EDS (EDX) – Oxford

 

Applications:  Elemental analysis of points or maps of areas revealed by SEM

EDS (EDX) Analysis provides elemental analysis of a sample inside a SEM, TEM or FIB. Our new AZtec from Oxford is a new and revolutionary materials characterization system that  gathers accurate data at the micron-scale.

Elemental analysis of points  - EDS (EDX) - Oxford 

 

 Elemental analysis for SEM 

 
  • Launched in 2011, AZtec-Energy combines the latest generation of detector hardware, multi-tasking software, decades of EDS know-how and feedback from the world’s largest user community to create a platform that pushes back the boundaries of EDS analysis.

AZtec-Energy 

 

EDS vs XPS – Depth of Information

EDS vs XPS  

 

 X-MaxFeatures

    • The X-MaxN is a SDD detector resolution and low energy detectability is independent of sensor size because of its external FET design.
    • The same sensor position means that the count rate simply increases in proportion to sensor size
    • The same outstanding resolution performance is guaranteed on all sensor sizes
    • Excellent low energy analysis, including Be detection on all sensor sizes

 X-MaxN -  SDD detector resolution 

 

X-MaxBenefits

    • Productive count rates at low beam currents
    • Maximising imaging performance and accuracy
    • No need to change imaging conditions for X-ray analysis
    • Significantly higher count rates at the same beam current
    • Shorter acquisition times
    • Better statistical confidence
    • Practical analysis with small beam diameters
    • Maximising spatial resolution
    • Getting the best out of your high resolution SEM