Helios NanoLab 400 – FEI

 

Applications of FIB-SEM: 

    • Using the FIB, cut the sample, then use the SEM to locate and image any defect
    • Cut a thin slice (30-50 nm), then lift it out, then image it using TEM/STEM with EDS/EELS to measure the chemistry

 

 

The Helios NanoLab 400 includes a five-axis stage with 100 mm of travel in X and Y. All-axis piezo drive and chamber mounting provide industry-leading stage repeatability. Samples up to 100 mm can be introduced through the load lock for optimal throughput. Larger samples may be accommodated (with limited travel) through the chamber door.