Helios NanoLab 400 – FEI

 

Applications of FIB-SEM: 

    • Using the FIB, cut the sample, then use the SEM to locate and image any defect
    • Cut a thin slice (30-50 nm), then lift it out, then image it using TEM/STEM with EDS/EELS to measure the chemistry

 

 

The Helios NanoLab 400 includes a five-axis stage with 100 mm of travel in X and Y. All-axis piezo drive and chamber mounting provide industry-leading stage repeatability. Samples up to 100 mm can be introduced through the load lock for optimal throughput. Larger samples may be accommodated (with limited travel) through the chamber door.

 

 

News

Announced: July 26, 2017
Boosts Instrument Capacity to Become World's Largest Independent Microscopy Lab
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Announced: August 25, 2015
Nanolab Technologies LEAPS Forward with High-Performance Analysis Services
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