TEM & STEM – EELS & EDS

 

Application: 
Measure atomic-scale or nano-scale features or defects, film thicknesses and measure elemental chemistry at specific points, by line profiling or by XY mapping

TEM and STEM are high spatial resolution electron microscopy techniques whereby a beam of electrons is transmitted through an ultra thin specimen, interacting with the specimen as it passes through.

An image is formed from the interaction of the electrons transmitted through the specimen; the image is magnified and focused onto an imaging device, such as a fluorescent screen, on a layer of photographic film, or to be detected by a sensor such as a CCD camera.

EDS Detector - Nanolab Technologies 

EDS Detector




Element Map Using EDS - - Nanolab Technologies 

Element Map Using EDS

Survey Scan For The Elements- EDS 

Survey Scan For The Elements- EDS



EELS Detector System 

EELS Detector System




TEM & STEM – EELS & EDS 


FEATURES SPECIFICATIONS
 Beam  300 KV
 Resolutions  0.17 nm (UHR)
 Lens aberration  Cs = 0.6 mm
 Stage  +/- 25° tilt
 Options  EDS
 Samples  All nature, see preparation
 Requirements  GDSII if dual-beam preparation Required
 Preparation  Mechanical cleaving or dual beam
 Output  All image format. Interpretation available



TEM & STEM – EELS & EDS - Tools from Nanolab 


 

TEM & STEM – EELS & EDS -- Tools from Nanolab 


 

TEM & STEM – EELS & EDS -- 



 

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