K-Alpha – Thermo


Applications of XPS:

    • Survey the atom %s  of elements in top 1-12 nm
    • Resolve mixtures of chemical states (e.g.  Si, SiO and SiO2)
    • Profile the change in element atom% versus depth
    • Map the uniformity of surface chemistry of a large area
    • Surface contamination
    • Chemical state shanges due to processing or heating
    • Check the purity of a chemical – check its formula – eg MO3

NanoLab’s State-of-the-art XPS 
NanoLab’s State-of-the-art XPS


AI X-ray - XPS - Nanolab Technologies XPS in a Nano-Nutshell 


The award-winning Thermo Scientific K-Alpha X-ray photoelectron spectrometer (XPS) features superior performance, fast analysis and outstanding chemical detectability. By combining cutting edge mono XPS performance with intelligent automation, K-Alpha is designed for a multi-user environment.

The K-Alpha’s intuitive operation meets the requirements of both experienced XPS analysts and newcomers to the technique. Analytical options include a tilt module for AR-XPS data collection and a recirculating inert-gas glove box for transfer of air-sensitive samples.


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Capabilities & Sample Sizes

X-ray Photoelectron Spectroscopy 


X-ray Photoelectron Spectroscopy (XPS) is a quantitative spectroscopic technique that measures the elemental composition, empirical formula, chemical state and electronic state of the elements that exist within the surface (1-12 nm) of any material.  XPS is also known as Electron Spectroscopy for Chemical Analysis (ESCA).

Global uses for XPS include production control, materials development, quality control, problem solving, failure analysis, and reverse engineering. XPS produces data including elemental analysis of atoms, chemical state information, and angle dependent chemistry profiles.

Strengths and Advantages of XPS:

    • Complete unknown – chemistry and thickness
    • Chemical state information (eg Si vs SiOx)
    • Reliable quantification -  greater than 95% accuracy
    • Analyzes insulators and conductors
    • Elemental analysis – all elements (except H)

Routine Analysis:

    • Surface contamination, corrosion, discoloration
    • Chemical state information
    • Chemistry information down to 12 nm

Advanced Analysis:

    • Chemical depth profile down to 2,000 nm
    • Non-destructive chemistry versus depth from 1-12 nm
    • Surface uniformity of chemical states
    • Quality control with greater than 95% accuracy

XPS vs EDS – Depth of Chemistry Information

XPS vs EDS – Depth of Chemistry Information 

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