Scanning Optical Microscopy
EMMI, Laser Scan, OBIRCH, SOM
The confocal mode provides a form of super-resolution and allows the depth of field of the microscope to be tuned at will, and extended, in principle, without limit. The image is built up on a cathode ray tube display by mechanically scanning the object across a focussed spot.
SOM is a scanning optical microscope used for fault localization of integrated circuits using laser induced phenomena. It is an integrated compucentric system designed for maximum ease of use and flexibility.
The system is optimized for high laser power delivery, sensitivity and spatial resolution. The open architecture of the system allows the application of current and future laser induced techniques. The modular design facilitates customization for industrial use, the Analytical (Upright/Inverted) and the Tester Docked (Inverted) systems.
A fully equipped SEMICAPS SOM enables OBIC, LIVA, TIVA, SEI, OBIRCH and pulsed laser technique. The system uses a 1064nm and a 1340nm laser. The 1064nm laser is capable of electron-hole pair generation through backside silicon while the 1340nm laser is a high resolution thermal probe which allows localized heating.
The laser multiplexer provides seamless selection, attenuation and blanking of the two lasers. The SOM microscope module is custom designed to provide maximum flexibility for the optical components required for various techniques.
Included in the microscope module is a motorized detector selector, two 3-position optical component turrets and a 5-position objective turret. The system comes with an auxiliary signal port, which has a proprietary hardware averager capable of 1 million sample averaging.
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