Characterizes the elemental composition and chemical states of each element within the very top 1-12 nm

XPS - Nanolab  



    • Production Control
    • Materials Development
    • Quality Control
    • Problem Solving
    • Failure Analysis
    • Reverse Engineering


    • Contamination
    • Adhesion
    • Thickness of films
    • Delamination (peeling)
    • Complete unknown
    • Good vs Bad 
    • A versus B
    • Chemical state info
    • After processing
    • QC / QA (>95%)
    • Bulk analysis
    • Powders, fibers, oils
    • Many more – let’s talk

XPS Analyses - Advantage of Working with Nanolab 


 Advantages of Working with Nanolab for XPS Analyses  (PDF)


 Examples of Spectra, Depth Profiles and Maps

Spectra, Depth Profiles and Maps 


Chemical State Spectrum 


Non-destructive Tilt Depth Profile 


Ion Etched Depth Profile 



    • 128 channel detector (not 32)
    • Superfast profiles/maps
    • Snapshot spectra (50 eV wide)
    • >1 Mcps at 400 um beam
    • >50 Kcps at 30 um beam
    • Monochromatic X-rays
    • Live optical views
    • Mesh and Ar+ / e-charge control
    • No BE errors from rastered X-rays
    • Contiguous spot sizes (30…..400µ)
    • Contiguous step sizes (0.01….4 eV/step)
    • Auto-calibration

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X-ray Photoelectron Spectroscopy (XPS) is a quantitative spectroscopic technique that measures the elemental composition, empirical formula, chemical state and electronic state of the elements that exist within the surface (1-12 nm) of any material.  XPS is also known as Electron Spectroscopy for Chemical Analysis (ESCA).

Global uses for XPS include production control, materials development, quality control, problem solving, failure analysis, and reverse engineering. XPS produces data including elemental analysis of atoms, chemical state information, and angle dependent chemistry profiles.

Strengths and Advantages of XPS:

    • Complete unknown – chemistry and thickness
    • Chemical state information (eg Si vs SiOx)
    • Reliable quantification –  greater than 95% accuracy
    • Analyzes insulators and conductors
    • Elemental analysis – all elements (except H)

Routine Analysis:

Advanced Analysis:

    • Chemical depth profile down to 2,000 nm
    • Non-destructive chemistry versus depth from 1-12 nm
    • Surface uniformity of chemical states
    • Quality control with greater than 95% accuracy


    • Survey scans
    • Chemical state scans
    • Atom % vs depth plots
    • 3D Montage plots
    • Non-destructive profiles
    • Special spectra-call us.


    • Newest instrumentation
    • Glove-box (Argon or N²)
    • 30 yr XPS Expertise
    • 60,000 XPS Spectra Database
    • NIST 25,000 BE Database
    • ISO TC/20 Member
    • Internationally known expert
    • SDP v4.6 Software (6 month free use)


    • As-received
    • Argon ion etch
    • Carbon reduction by Ar+
    • Freeze fracture under argon
    • Advanced treatments – let us
      help with your special needs.


    • Fracture under Argon
    • LN² freeze fracture under Argon)
    • Scrape clean under Argon
    • Heat under Argon


    • Surface contamination, corrosion, discoloration
    • Complete unknown – chemistry and thickness
    • Elemental analysis with >95% accuracy
    • Chemistry state info (e.g C-H vs C-F vs C=O)
    • Chemistry versus depth down to 200 nm


    • Chemical depth profile down to 1000 nm
    • Non-destructive chemistry versus depth
      from 1 to 12 nm (AR-XPS)
    • Surface uniformity of chemical states (XY map)
    • Quality control (QC) with >95% accuracy

NanoLab’s State-of-the-art XPS 

NanoLab’s State-of-the-art XPS


 XPS vs EDS – Depth of Useful Information – select the one that helps best!

 XPS vs EDS – Depth of Useful Information  


X-ray Photo-electron Spectroscopy 


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