Ultra High Resolution FE-SEM


 Images nano-scale surface features (1-10 nm deep), measures electron BSI and via EDS measures elemental composition of points, lines and maps

(0.5-3.0µ depth of info)




Magnifications of up to 600,000x are possible with resolution on the order of nanometers. Global uses of FE-SEM include quality control, problem solving, failure analysis, production control, materials development, and reverse engineering.

The ultra high resolution SEM and BackScattered Electron (BSE) images can be exported as TIFF, BMP, or JPEG data files.

Strengths and Advantages:

    • 0.8 nm at 30 kV
    • 1.4 nm at 1 kV
    • Beam landing energy: 50 V- 30 kV
    • In-lens SE and BSE detectors

Routine Imaging:

    • Particles, defects, fibers, and nano-contamination
    • Low vacuum, low voltage
    • Insulators, semiconductors or conductors

Advanced Imaging and Analyses:

    • Surface uniformity
    • Quality control
    • Viscous liquids, greases, fibers, and nano-particle

If you need specialty work, please give us a call.

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