Characterizes the near surface (0.5-3.0 µ) elemental composition at any depth produced by Ga+ ion beam milling
EDS vs XPS – Depth of Information
Energy Dispersive X-ray Spectroscopy (EDS) is an analytical technique used for the elemental analysis of the near surface bulk (0.5-3 µ) of a solid sample. The information collected is from a volume with a diameter ranging from 0.5 to 3.0 µ that is 0.5 to 3.0 µ below the actual surface of the sample.
It relies on electron induced X-ray excitation within a sample. Its’ characterization capabilities are due to the fundamental principle that each element has a unique atomic structure that generates a unique set of peaks in an X-ray energy spectrum.
To stimulate the emission of characteristic X-rays from a specimen, a high-energy beam of electrons (5-25 keV), is focused into the sample being studied.
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