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Glossary of Terms
 

A Guide to the Alphabet Soup of Analytical Instruments

  • AES – Auger Electron Spectroscopy
  • AFM – Atomic Force Microscopy
  • AEM – Analytic Transmission Electron Microscopy
  • C-SAM – C-Mode Scanning Acoustic Microscopy
  • C-SOM – Confocal Scanning Optical Microspocy
  • CE-FIB – Circuit Edit-Focused Ion Beam
  • D-SIMS – Dynamic-Secondary Ion Mass Spectrometry
  • E-SEM – Environmental-Scanning Electron Microscopy
  • EDS – Energy-Dispersive (X-Ray) Spectrometry (aka EDX)
  • EELS – Electron Energy Loss Spectrometer
  • ESCA – Electron Spectroscopy for Chemical Analysis (aka XPS)
  • FE-SEM – Field Emission – Scanning Electron Microscopy
  • FE-TEM – Field Emission – Transmission Electron Microscopy
  • FIB – Focused Ion Beam
  • FIB-SEM – Focused Ion Beam-Scanning Electron Microscopy
  • FMI – Flourescent Micro-Thermal Imaging
  • FT-IR – Fourier Transform Infra-Red Spectroscopy
  • GD-MS – Glow Discharge-Mass Spectrometry
  • GD-OES – Glow Discharge-Optical Emission Spectrometry
  • ICP-MS – Inductively Coupled Plasma-Mass Spectometry
  • ICP-OES – Inductively Coupled Plasma-Optical Emission Spectometry
  • P-FIB – Plasma-Focused Ion Beam
  • RAMAN – Raman Spectroscopy
  • SEM – Scanning Electron Microscopy
  • SIMS – Secondary Ion Mass Spectrometry
  • STEM – Scanning Transmission Electron Microscopy
  • TDR – Time Domain Refectometry
  • TEM – Transmission Electron Microscopy
  • TOF-SIMS – Time-of-Flight – Secondary Ion Mass Spectromentry
  • TXRF – Total Reflection X-Ray Flourescence
  • VASE – Variable Angle Spectroscopic Ellopsometry
  • WD-XRF – Wavelength Dispersive X-Ray Flourescence
  • URH – Ultra High Resolution
  • XPS – X-Ray Photoelectron Spectrometry (aka ESCA)
  • XRD – X-Ray Diffraction
  • XRR – X-Ray Relectometry

Download:   Glossary of Terms – Acronyms  (PDF)


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