Glossary of Terms

• AES – Auger Electron Spectroscopy
• AFM – Atomic Force Microscopy
• AEM – Analytic Transmission Electron Microscopy
• C-SAM – C-Mode Scanning Acoustic Microscopy
• C-SOM – Confocal Scanning Optical Microspocy
• CE-FIB – Circuit Edit-Focused Ion Beam
• D-SIMS – Dynamic-Secondary Ion Mass Spectrometry
• E-SEM – Environmental-Scanning Electron Microscopy
• EDS – Energy-Dispersive (X-Ray) Spectrometry (aka EDX)
• EELS – Electron Energy Loss Spectrometer
• ESCA – Electron Spectroscopy for Chemical Analysis (aka XPS)
• FE-SEM – Field Emission – Scanning Electron Microscopy
• FE-TEM – Field Emission – Transmission Electron Microscopy
• FIB – Focused Ion Beam
• FIB-SEM – Focused Ion Beam-Scanning Electron Microscopy
• FMI – Flourescent Micro-Thermal Imaging
• FT-IR – Fourier Transform Infra-Red Spectroscopy
• GD-MS – Glow Discharge-Mass Spectrometry
• GD-OES – Glow Discharge-Optical Emission Spectrometry
• ICP-MS – Inductively Coupled Plasma-Mass Spectometry
• ICP-OES – Inductively Coupled Plasma-Optical Emission Spectometry
• P-FIB – Plasma-Focused Ion Beam
• RAMAN – Raman Spectroscopy
• SEM – Scanning Electron Microscopy
• SIMS – Secondary Ion Mass Spectrometry
• STEM – Scanning Transmission Electron Microscopy
• TDR – Time Domain Refectometry
• TEM – Transmission Electron Microscopy
• TOF-SIMS – Time-of-Flight – Secondary Ion Mass Spectromentry
• TXRF – Total Reflection X-Ray Flourescence
• VASE – Variable Angle Spectroscopic Ellopsometry
• WD-XRF – Wavelength Dispersive X-Ray Flourescence
• URH – Ultra High Resolution
• XPS – X-Ray Photoelectron Spectrometry (aka ESCA)
• XRD – X-Ray Diffraction
• XRR – X-Ray Relectometry