Glossary of Terms
- AES – Auger Electron Spectroscopy
- AFM – Atomic Force Microscopy
- AEM – Analytic Transmission Electron Microscopy
- C-SAM – C-Mode Scanning Acoustic Microscopy
- C-SOM – Confocal Scanning Optical Microspocy
- CE-FIB – Circuit Edit-Focused Ion Beam
- D-SIMS – Dynamic-Secondary Ion Mass Spectrometry
- E-SEM – Environmental-Scanning Electron Microscopy
- EDS – Energy-Dispersive (X-Ray) Spectrometry (aka EDX)
- EELS – Electron Energy Loss Spectrometer
- ESCA – Electron Spectroscopy for Chemical Analysis (aka XPS)
- FE-SEM – Field Emission – Scanning Electron Microscopy
- FE-TEM – Field Emission – Transmission Electron Microscopy
- FIB – Focused Ion Beam
- FIB-SEM – Focused Ion Beam-Scanning Electron Microscopy
- FMI – Flourescent Micro-Thermal Imaging
- FT-IR – Fourier Transform Infra-Red Spectroscopy
- GD-MS – Glow Discharge-Mass Spectrometry
- GD-OES – Glow Discharge-Optical Emission Spectrometry
- ICP-MS – Inductively Coupled Plasma-Mass Spectometry
- ICP-OES – Inductively Coupled Plasma-Optical Emission Spectometry
- P-FIB – Plasma-Focused Ion Beam
- RAMAN – Raman Spectroscopy
- SEM – Scanning Electron Microscopy
- SIMS – Secondary Ion Mass Spectrometry
- STEM – Scanning Transmission Electron Microscopy
- TDR – Time Domain Refectometry
- TEM – Transmission Electron Microscopy
- TOF-SIMS – Time-of-Flight – Secondary Ion Mass Spectromentry
- TXRF – Total Reflection X-Ray Flourescence
- VASE – Variable Angle Spectroscopic Ellopsometry
- WD-XRF – Wavelength Dispersive X-Ray Flourescence
- URH – Ultra High Resolution
- XPS – X-Ray Photoelectron Spectrometry (aka ESCA)
- XRD – X-Ray Diffraction
- XRR – X-Ray Relectometry
