Applications of FIB-SEM:
- Using the FIB, cut the sample, then use the SEM to locate and image any defect
- Cut a thin slice (30-50 nm), then lift it out, then image it using TEM/STEM with EDS/EELS to measure the chemistry
The Helios NanoLab 400 includes a five-axis stage with 100 mm of travel in X and Y. All-axis piezo drive and chamber mounting provide industry-leading stage repeatability. Samples up to 100 mm can be introduced through the load lock for optimal throughput. Larger samples may be accommodated (with limited travel) through the chamber door.
