Evaluation of Materials used in the fab and production lines is key to knowing what does and does not cause contamination of a production line. Nanolab Technologies has the expertise to determine levels of cleanliness and whether a material or component will introduce contamination.
Sample Types for Evaluation
Parts that are potential sources of contamination
- Wafer carriers/shippers/FOUPs/clams
- Brass valves
- Filters and components
- Piping material
- Tubing or hoses
- Wipes, rollers and brushes
- Gloves
- Wet bench material (vapors of acids, bases)
- De-Ionized water systems
- HEPA/ULPA filters
Sampling
- Water extraction
- Acid extraction
- Solvent extraction
- Direct surface analysis
Analytical Tools to Analyze the Materials