Applications of UHR-SEM:

    • Image features of interest
    • Check dimensions of features
    • Look for nano-scale defects 



The Nova NanoSEM 630 dramatically expands the capabilities of its predecessor in the low and very low kV characterization as well as its analytical capabilities: access to sub-100 V imaging with high surface sensitivity, superb low kV BSE and faster analysis are now possible.

Featuring advanced optics that include a 2-mode final lens (immersion and field-free),  SE/ BSE in-lens detection and beam deceleration technologies, the Nova NanoSEM 630 is a complete solution for ultra-high resolution characterization at high and low voltage in high vacuum.




    • Yield Enhancement
    • Dendrite Growth Debug
    • Package Design Debug
    • Problem Solving
    • Qualification Failure
    • Failure Analysis
    • Reverse Engineering


    • Particle analysis
    • Contamination
    • Good versus Bad (failed)
    • A versus B
    • Element composition
    • Multi-point QC
    • Powders, fibers, nano-









A SEM is a type of electron microscope that images a sample by scanning it with a beam of electrons in a raster scan pattern. The electrons interact with the atoms that make up the sample producing signals that contain information about the sample’s surface typography, composition, and other properties such as electrical conductivity.

Strengths and Advantages of FE-SEM:

  • 0.8 nm at 30 kV
  • 1.4 nm at 1 kV
  • Beam landing energy: 50 V- 30 kV
  • In-lens SE and BSE detectors
  • EDS for elemental analysis

Routine Imaging and Analyses:
  • Complete unknown – chemistry and thickness
  • Particles, defects, fibers, and nano-contamination
  • Elemental composition by EDS
  • Low vacuum, low voltage
  • Insulators, semiconductors or conductors

Advanced Imaging and Analyses:

  • Surface uniformity of elements
  • Quality control
  • Viscous liquids, greases, fibers, and nano-particle

Nano-Wires (ZrO2)


Element Map Using EDS


Medicine Tablet

Survey Scan For The Elements- EDS


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