Applications of SOM
- Frontside & Backside photon emission for leakage & junction damage
- Frontside & Backside laser stimulation for hot spots & carrier activity
- High resolution confocal microscopy for die cracks, chip out or other anomalies
Global uses of SOM 4000 include failure analysis, yield enhancement, ESD/latch-up failures, problem solving, design debug, and qualification failures.
Strengths and Advantages of SOM 4000:
- 300 mm wafer analysis
- InGaAs detector
- High resolution confocal laser microscopy
- Thermal and Carrier laser stimulation
- Analytical probing
- Low cost setup for backside analysis
Advanced Analyses:
- Pulsed laser analysis without lock-in
- Tester docked analysis with Soft Defect Localization (SDL)
Photon Emission
(using InGaAs detector)
