Measure atomic-scale or nano-scale features or defects, film thicknesses and measure elemental chemistry at specific points, by line profiling or by XY mapping
TEM and STEM are high spatial resolution electron microscopy techniques whereby a beam of electrons is transmitted through an ultra thin specimen, interacting with the specimen as it passes through.
An image is formed from the interaction of the electrons transmitted through the specimen; the image is magnified and focused onto an imaging device, such as a fluorescent screen, on a layer of photographic film, or to be detected by a sensor such as a CCD camera.
EELS Detector System
|Resolutions||0.17 nm (UHR)|
|Lens aberration||Cs = 0.6 mm|
|Stage||+/- 25° tilt|
|Samples||All nature, see preparation|
|Requirements||GDSII if dual-beam preparation Required|
|Preparation||Mechanical cleaving or dual beam|
|Output||All image format. Interpretation available|