Characterizes the elemental composition and chemical states of each element within the very top 1-12 nm


XPS (ESCA) - Nanolab Technologies  XPS (ESCA) - Nanolab Technologies 



    • Production Control
    • Materials Development
    • Quality Control
    • Problem Solving
    • Failure Analysis
    • Reverse Engineering



    • Contamination
    • Adhesion
    • Thickness of films
    • Delamination (peeling)
    • Complete unknown
    • Good vs Bad (failed)
    • A versus B
    • Chemical state info
    • After processing
    • QC/QA (>95%)
    • Bulk analysis
    • Powders, fibers, oils
    • Many more-let’s talk.


Ion Etched Depth Profile - 3D Montage Plot 


Non-Destructive Tilt Depth Profile 


Chemical State Spectrum 


Survey Spectrum - XPS (ESCA) 



    • 128 channel detector (not 32)
    • Superfast profiles/maps
    • Snapshot spectra (50 eV wide)
    • 1 Mcps at 400 um beam
    • 50 Kcps at 30 um beam
    • Monochromatic X-rays
    • Live optical views
    • Mesh and Ar+/e- charge control
    • No BE errors from rastered X-rays
    • Continuous spot size (30….400µ)
    • Continuous step size (0.01….4 eV/step)
    • Auto-calibration


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X-ray Photoelectron Spectroscopy (XPS) is a quantitative spectroscopic technique that measures the elemental composition, empirical formula, chemical state and electronic state of the elements that exist within the surface (1-12 nm) of any material.  XPS is also known as Electron Spectroscopy for Chemical Analysis (ESCA).

Global uses for XPS include production control, materials development, quality control, problem solving, failure analysis, and reverse engineering. XPS produces elemental composition analysis, chemical state information, line profiles, depth profiles and non-destructive angle resolved chemistry profiles.

Strengths and Advantages of XPS:

    • Complete unknown – chemistry and thickness
    • Chemical state information (eg Si vs SiOx)
    • Reliable quantification –  greater than 95% accuracy
    • Analyzes insulators and conductors
    • Elemental analysis – all elements (except H)


Routine Analysis:

    • Surface contamination, corrosion, discoloration
    • Chemical state information
    • Chemistry information down to 12 nm


Advanced Analysis:

    • Chemical depth profile down to 2,000 nm
    • Non-destructive chemistry versus depth from 1-12 nm
    • Surface uniformity of chemical states
    • Quality control with greater than 95% accuracy


XPS vs EDS – Depth of Information
Select the depth most useful to collect the info needed.

XPS vs EDS – Depth of Information 


XPS = X-ray Photo-electron Spectroscopy 


NanoLab Technologies’ State-of-the-art XPS 
NanoLab’s State-of-the-art XPS

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